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An efficient fab requires seamless integration of tools in process monitoring and process optimization solutions, such as APC. With SEMI standards, integration goes through two separate interfaces – SECS/GEM for MES applications and EDA/Interface A for EES applications. Such integration requires substantial engineering time and cost. To date, consistent solutions rarely existed.
Our new software suite Equipment Interface TLK changes that by providing a universal interface for all commonly used tools. It permits single-source engineering through both SEMI-compliant interfaces, enabling direct communications to the MES and EES.
Interested in Equipment Interface TLK? For more information, please click on the respective document under “Related Links”.
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Equipment Interface TLK – the universal SECS/GEM and EDA interface |
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