|
|

|
| Processes in the Semiconductor Industry |
|

|

|

|

|

|
Home > Processes > Components > Facility |

|

|

|

|

|

|

|

|

|

|

|
HVAC | Water Treatment | Gases | Chemicals | Life Safety | Security | Power |

|

|

|

|

|

|

|

|

|

|

|

Capture and control … conditions, cost and complexity

Display production today would be impossible without the availability of a range of gases. Crucial to this necessity is maintaining environmental conditions in the fab while optimizing operating costs. Adding complexity is that many operations use a combination of locally and remotely attended Facility Package Units.
Fortunately, Siemens FabFocus for fab building automation offers a state-of-the-art answer for the seamless integration of gas supply package units. Siemens – through unprecedented agreements with other suppliers – offers a total integrated facility management and control solution. Based on SIMATIC PCS 7, FabFocus provides:
- Interconnectibility
- Adherence to de-facto industry standards such as OPC Data Access, Alarms & Events, Historical Data Access, OPX-XML and OPC-DX
- Communication based on SEMI based Standard (E54) and Industrial Ethernet.
Siemens can provide the control you need to maintain your environment, optimize costs and deal with the increasing complexities of Facility Management and Control. |

|

|

|

|

|

|
|

|
|
Further Information |
|
|