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Semiconductor Fabrication:  Cost-optimized, on-site HMI with
TP 170A
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In the semiconductor fabrication industry, traditional HMI components supplying tools with special gases have to a large extent been replaced by
Touch Panels. With a cost-optimized Touch Panel version including PROFIBUS connection and analog-resistive surface
the Reinhold Fäth GmbH, a high-purity media specialist, is for the first time utilizing this
technology for simpler applications. Among the advantages are greater control and visualization convenience. At a wafer plant in Malaysia, 85 Touch
Panels are employed for controlling and monitoring the gas supply.
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